| 摘要 |
PROBLEM TO BE SOLVED: To make accurate a device for detecting the change in a series resonance point caused by the adhesion of a small amount of mass to a quartz resonator of a weight sensor, a chemical sensor, an immunity sensor, a viscosity sensor, a coating thickness meter, or the like, and to obtain a method for calibrating the detection device accurately. SOLUTION: By using the quartz resonator having an extremely higher fundamental frequency than a conventional one, and the harmonics of the quarts resonator, detection accuracy is improved to detect an extremely small amount of mass. At the same time, by detecting the change in the series resonance point by an impedance analyzer, the change in the resonance point to the addition of mass can be measured strictly. Also, by using the plasma polymerization method to the quartz resonator for coating a plasma polymerization film for a specific amount of time, the mass of the coated plasma polymerization film is detected, and the addition of a specific amount of mass to the quartz resonator is compared with a detection mass, the detection device can be calibrated strictly, and hence obtaining a more accurate detection device.
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