发明名称 METHOD FOR PRODUCING OPTICAL MEMBER, OPTICAL MEMBER AND PROJECTION EXPOSURE DEVICE
摘要 PROBLEM TO BE SOLVED: To enhance the optical performance of an optical member. SOLUTION: This method for producing the optical member, comprising blowing out a silicon compound from the central portion of a burner 1 to hydrolyze the silicon compound in an oxyhydrogen flame and then forming the melted glass on a rotary target 2 to synthesize the ingot 7, while swinging the rotary target in the direction X, is characterized by determining the swinging stoke to satisfy the expression: R/5<=D<=R (wherein, D is a relative distance value, when the relative distance between an axis extended in a direction approximately parallel to the shaft Z through the center of a burner 1 and the rotation center axis of the rotary target 2 is maximized with the swinging movement; and R is the radius of the ingot 7).
申请公布号 JP2001302255(A) 申请公布日期 2001.10.31
申请号 JP20000118037 申请日期 2000.04.19
申请人 NIKON CORP 发明人 NAKAGAWA KAZUHIRO;HIRAIWA HIROYUKI
分类号 G03F7/20;C03B8/04;C03B19/14;C03C3/06;G02B1/00;H01L21/027;(IPC1-7):C03B8/04 主分类号 G03F7/20
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