| 摘要 |
PROBLEM TO BE SOLVED: To reduce the number of pores by improving dispersibility of tin and to efficiently manufacture a target of ITO sintered compact reduced in the occurrence of nodules and suitably used for deposition of ITO thin film and, hereby, to suppress deterioration in film quality and reduction in the productivity of film. SOLUTION: The ITO target can be manufactured by mixing a disperse solution in which metastannic acid is dispersed with a disperse solution in which indium hydroxide is dispersed to form a mixed disperse solution, drying and calcining this mixed disperse solution, and subjecting a green compact of the resultant oxide powder mixture to sintering. |
