| 摘要 |
PROBLEM TO BE SOLVED: To provide a plane inspection apparatus and a plane inspection method capable of efficiently inspecting flatness using an interference fringe. SOLUTION: This plane inspection apparatus is provided with an interferometer 31 and an image processor 61 for processing image data obtained from the interferometer 31. The image processor 61 is provided with a binarizing processing part 63 for binarizing the image data according to shading, a distribution width detecting part 66 for detecting the distribution width of the interference fringe, a pitch detecting part 67 for detecting the generation interval of interference fringes, a interruption detecting part 68 for detecting interruption of the interference fringe, a flatness calculating part 69 for calculating the flatness from the distribution width of the interference fringe and the generating interval of the interference fringe, and a determining part 71 for determining the quality of flatness of the inspected surface according to the detected distribution width, the interruption of the generated interval interference fringe and the calculated flatness.
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