| 摘要 |
PROBLEM TO BE SOLVED: To provide a new method for easily monitoring the change of a trace quantity of ionic substance included in gas in a clean room, with high sensitivity. SOLUTION: Gas existing in a detected space, and a high-purity nonbasic polar organic solvent e.g. alcohol such as isopropyl alcohol are brought into age-based contact with each other. An electric signal based on the electric resistance of the high-purity nonbasic polar organic solvent is detected, and the quanity change of the ionic substance existing in the gas, appearing in the change of electric signals is monitored with the lapse of time.
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