| 摘要 |
PROBLEM TO BE SOLVED: To hold an X-ray irradiation condition constant in the changeover of irradiation X-rays, to irradiate a sample with sufficient secondary X-rays and to irradiate the micro parts of the sample with the secondary X-rays. SOLUTION: This secondary target device is provided with a target body formed by arranging a plurality of target members provided with secondary target members at least at target faces opposed to a center axis formed of a straight line connecting an X-ray source to a sample irradiating position, radially with different distance from the center axis, and an X-ray impeding member disposed on the center axis to impede the irradiation of primary X-rays from the X-ray source to the sample irradiating position. The primary X-ray irradiates only the target face of a secondary target without passing through a clearance of the secondary target, and the secondary X-ray from the target face passes through the clearance of the secondary target and reaches the sample irradiating position.
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