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发明名称
Messung der AFM Hebelarmauslenkung mit Hochfrequenzstrahlung und Dotierungsprofilometer
摘要
申请公布号
DE69522934(D1)
申请公布日期
2001.10.31
申请号
DE1995622934
申请日期
1995.02.07
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK
发明人
BOURGOIN, MARIE;JOHNSON, BRUCE;MICHEL, BRUNO
分类号
G01B21/30;G01B7/34;G01L1/04;G01N27/00;G01N37/00;G01Q10/06;G01Q20/00;G01Q30/00;G01Q60/04;G01Q60/26;G01Q60/30;G01Q60/32;G01Q60/34;H01J37/28;H01L21/66;(IPC1-7):G01B7/34
主分类号
G01B21/30
代理机构
代理人
主权项
地址
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