摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for purifying tetrafluoromethane by contacting the tetrafluoromethane containing impurities with an adsorbent to adsorb the impurities, by which the highly pure tetrafluoromethane can economically and profitably be obtained. SOLUTION: This method for purifying the tetrafluoromethane, characterized by bringing the tetrafluoromethane containing ethylene compounds, hydrocarbon compounds, carbon monoxide and/or carbon dioxide into contact with a zeolite having an average fine pore diameter of 3.4Åto 11Åand/or a carboneceous adsorbent having an average fine pore diameter of 3.4Åto 11Å.</p> |