| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo-molecular pump which has a valve element covering an inlet port provided to a casing so as to be capable of opening/closing, can constitute a whole of the turbo-molecular pump including a valve device to be reduced in size, and includes a valve driving mechanism in which high reliability in opening/closing of the valve element can be realized. SOLUTION: In this turbo-molecular pump, a rotor R and a stator S are stored inside the casing 13, and an exhaust passage is provided between the rotor R and the stator S. This turbo-molecular pump comprises: the valve element 15 covering the inlet port 14 provided to the casing 13 so as to be capable of opening/closing; and the valve driving mechanism driving the valve element 15. The valve driving mechanism 40 is constituted of a valve rod 30 inserted through at least a through hole formed in the rotor, an elevation mechanism comprised of a ball screw 44 and a ball screw nut 46, and a servomotor 43 for driving the elevation mechanism.
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