OPTICAL PARTS, OPTICAL MODULE AND METHOD FOR FORMING OPTICAL PARTS

摘要

PROBLEM TO BE SOLVED: To provide a method for forming optical parts by which cost for the assembling of optical parts is reduced and a face to be worked can be worked in a complex shape such as the shape of a diffraction grating by a simple constitution. SOLUTION: A polyimide layer 13 with a face 15 perpendicular to the surface of a substrate 11 and a 45 deg. mirror 14 for guiding laser light 2 to the polyimide layer 13 are formed on the substrate 11. The perpendicular face 15 of the polyimide layer 13 is irradiated with laser light 2 in a direction perpendicular to the face 15 through the 45 deg. mirror 14 to work the polyimide layer 13.