COAXIAL PROBE AND SCANNING MICROWAVE MICROSCOPE USING IT

摘要

PROBLEM TO BE SOLVED: To measure an electrical impedance along the surface rugged shape by bringing a distance between a sample and a probe close to a level common to an atomic force microscope or bringing them into contact with each other. SOLUTION: A coaxial resonator is constructed by electrically connecting a conductive sensor 109 to a central conductor 107 in a coaxial cable 108 via a flat waveguide 101. The flat waveguide 101 is constructed of a base board 101a and a strip line 101b formed on the base board 101a. The conductive sensor 109 is constructed of a combination of a cantilever 109a and a probe 109b arranged in the free end of the cantilever 109a. One end of the cantilever 109a is electrically connected to one end of the strip line 101, while the other end of the strip line is electrically connected to the central conductor 107 in the coaxial cable 108.