| 摘要 |
<p>To realize a micro switch which can be mass-produced, is low-cost, and is high-performance. The micro switch includes: a supporting member 7 provided on a substrate 1 in such a manner as to be adjacent to the gap between two signal lines and to have a predetermined height with respect to the substrate 1; a flexible beam member (cantilever arm 8) provided in such a manner as to project from the supporting member almost horizontally to the above substrate surface and to extend so far that its part faces the above gap; a contact electrode 5 provided on the substrate 1 side of the beam member at least in such a position so as to face the gap, and a lower electrode 4 provided on the substrate 1 in such a manner as to face part of the beam member. A part of the beam member, ranging from the portion at which it is connected to the above supporting member 7 to the portion facing the above lower electrode 4, is allowed to be conductive to function as an upper electrode 9. And the thermal expansion coefficients of the beam member are allowed to be almost symmetric in the thickness direction perpendicular to the above substrate 1 surface, at least in a region ranging from the portion at which it is connected to the above supporting member 7 to the vicinity of the portion facing the above lower electrode 4. <IMAGE></p> |
