发明名称 METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE TYPE GRATING
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical waveguide type grating wherein choices of members composing the optical waveguide type grating are widened, a manufacturing time is reduced and excellent optical waveguide characteristics are obtained. SOLUTION: A resist pattern 13 is formed, a first core 14 is formed in at least a part of a place where the resist 13 does not exist, and a second core 15 is formed in at least a part of the place where the resist 13 has existed after removing the resist 13.
申请公布号 JP2001305369(A) 申请公布日期 2001.10.31
申请号 JP20000128949 申请日期 2000.04.25
申请人 HITACHI LTD 发明人 MATSUSHIMA NAOKI;KAWAMOTO KAZUTAMI;TOGAWA HIDEO
分类号 G02B6/13;G02B6/122;(IPC1-7):G02B6/13 主分类号 G02B6/13
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