| 摘要 |
PROBLEM TO BE SOLVED: To provide an appearance inspecting device for a liquid crystal substrate, having high accuracy in inspection and capable of easily distinguishing a defective mode and easily accumulating and controlling defective position information or the like while reducing required labor and manual assistance. SOLUTION: This device is provided with a ring light 2 and a line light 2 serving as a plurality of irradiating means for irradiating light from different directions toward the surface of the substrate which is an inspection object, and CCD cameras 6 and 7 serving as photographing means. The device is further provided with a biaxial robot 9 serving as a positioning means capable of freely moving the relative position of the substrate 1 to the CCD cameras, and a monitor 8 serving as a display means for acquiring image information by selecting and combining the appropriate ones out of the lights and CCD cameras at every part of the main surface, and processing the image for display so as to facilitate the detection of a defective part.
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