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发明名称
OPERATING SYSTEM FOR A VACUUM PUMP
摘要
申请公布号
EP0931378(B1)
申请公布日期
2001.10.31
申请号
EP19970948757
申请日期
1997.09.29
申请人
LEYBOLD VAKUUM GMBH
发明人
BAHNEN, RUDOLF;KRESSE, WOLFGANG;RONTHALER, KARL-HEINZ;TEICHGRAEBER, UTZ
分类号
H02P1/30;H02P1/26;H02P4/00;H02P27/04;H02P27/06;(IPC1-7):H02P7/628;H02P7/01
主分类号
H02P1/30
代理机构
代理人
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地址
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