| 发明名称 |
Method of removing antireflective compositions |
| 摘要 |
<p>Disclosed are compositions useful for removing antireflective compositions from a substrate. Also disclosed are methods of removing antireflective compositions from a substrate using such compositions.</p> |
| 申请公布号 |
EP1150172(A2) |
申请公布日期 |
2001.10.31 |
| 申请号 |
EP20010301617 |
申请日期 |
2001.02.22 |
| 申请人 |
SHIPLEY COMPANY LLC |
发明人 |
SAHBARI, JAVAD J.;RUTTER, EDWARD, W. JR.;CALVERT, JEFFREY M. |
| 分类号 |
B05D3/00;G03F7/11;B05D7/00;C09D9/00;G03F7/42;H01L21/027;(IPC1-7):G03F7/42 |
主分类号 |
B05D3/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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