PRESSURE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a highly precise pressure sensor. SOLUTION: This sensor transmits a pressure to a pressure detection part 20 by a piston 10 and detects the external pressure. The piston 10 is so arranged that its top end and the top end of a piston guide part 11 are flush with each other. A pressure diaphragm 13 is arranged on the same plane and tightly sealed by an O ring 15 and a fixed cover 17. This constitution can shield the external pressure parts and the internal pressure part and prevent the pressure leakage. The pressure detection part 20 is set to a highly rigid type pressure sensor. This constitution can make the displacement of the pressure diaphragm 13 and the piston to severalμm and set the pressure bearing area constant irrelevant to the impressed pressure. The pressure can be detected linearly accurately. A solid lubricant is applied on a piston sliding part 14. This application reduces the friction force of the piston 10 so as to highly precisely detect the external pressure.