| 摘要 |
PROBLEM TO BE SOLVED: To measure the surface state of a very small area and heighten the resolving power of measurement in the case of measuring a wavy form of a magnetic disk surface by irradiation of light. SOLUTION: A beam 10 emitted toward an inspected object 13 is shaped into a designated shape by a partial shielding plate 3, applied to the very small area b of the surface of the inspected object 13, and the reflected light from the inspected object 13 is enlarged by lenses 6, 7 and detected by a position detector 9 to detect the waviness of the surface of the inspected object 13. Thus, the emitted beam is shaped into a designated shape and concentrated on a partial area of the inspected object 13 to be irradiated, the waviness of the very small area can be detected, and reflected light is enlarged so that even if the distance between the inspected object and the lens is not taken large, the waviness in the very small area of the surface of the inspected object can be detected surely and with high resolving power.
|
