| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of producing a quartz crucible for pulling Si single crystal, by which the quartz crucible for pulling Si single crystal hardly softening, highly viscous and almost free from deformation at a high temperature can be obtained. SOLUTION: The method of producing the quartz glass crucible having a transparent inner surface part and an opaque outer surface part and useful for pulling the Si single crystal, comprises using a mold 5 which is composed of a supporting body 2 being a cylinder with a bottom and an inside member 3, being a cylinder with a bottom, having an inner surface formed into the same shape as that of the outer surface of the crucible, gas-permeable and being inserted in the supporting body 2 while providing a ventilating space 4 between its outer surface and the inner surface of the supporting body 2, supplying a quartz powder into the inside member 3 while rotating the mold around the its axis line, forming a quartz powder deposited layer 7 having a prescribed thickness and being formed into the same shape as that of the inner surface of the inside member 3, and heating the deposited layer 7 from inside. In the method of producing the quartz glass crucible mentioned above, when heating of the quartz powder deposited layer 7 is started, the quartz powder layer is simultaneously attracted through the ventilating space 4 and kept under reduced pressure for a prescribed time and thereafter gaseous argon is supplied to the quartz powder deposited layer 7 through the ventilating space 4.
|
