发明名称 Method for producing needle diamond-type structure
摘要 A method of producing a needle-like diamond structure including the steps of forming a layer of anodized alumina on a diamond substrate, the anodized alumina having a plurality of through holes; vapor-depositing a substance resistant to plasma etching by a vacuum vapor-depositing method to form dots on said diamond substrate, wherein the layer of anodized alumina acts as a mask for the vapor deposition; removing the anodized alumina; and performing a plasma etching treatment while using the dots as a mask, thereby forming regularly-arranged, needle-like diamond columns.
申请公布号 US6309554(B1) 申请公布日期 2001.10.30
申请号 US19990276908 申请日期 1999.03.26
申请人 THE UNIVERSITY OF TOKYO 发明人 FUJISHIMA AKIRA;MASUDA HIDEKI
分类号 C30B29/04;H01J9/02;(IPC1-7):B81B7/04 主分类号 C30B29/04
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