| 摘要 |
In a method for electrochemical processing of a substrate (S), use is made of an apparatus which comprises a container (1) having a chamber for holding an electrolyte, an electrode member (8) arranged in the chamber, and a substrate holder (60) arranged in the chamber and adapted to carry the substrate (S). A voltage source is connected to the electrode member (8) and the substrate holder (60) to establish, during processing, an electrical field in the electrolyte between the electrode member (8) and the substrate (S) carried by the substrate holder (60). A pressure control means is adapted to establish a subatmospheric pressure in the chamber during the electrochemical processing so that leakage of electrolyte from the container (1) to the surroundings is eliminated and so that the parts of the container (1) are automatically held together by the subatmospheric pressure in the chamber. |
