INK-JET RECORDING HEAD AND MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To highly accurately join a nozzle plate and an actuator chip each other at low costs. SOLUTION: The actuator chip 30 formed by cutting a silicon single crystal substrate of a (100) face orientation into a predetermined shape is joined to the nozzle plate 20. The actuator chip 30 includes pressure generation chambers 12 formed to the silicon single crystal substrate, a diaphragm 50 constituting part of inner wall faces for partitioning the pressure generation chambers 12, and pressure generation elements 300 for deforming the diaphragm 50 to change an ink pressure in the pressure generation chambers 12. The actuator chip 30 is cut along cutting lines formed by anisotropic wet etching to the silicon single crystal substrate into a pattern of the predetermined shape. At least one part 10a of side end faces of the actuator chip 30 is formed of a (111) face of the silicon single crystal substrate exposed by the anisotropic wet etching.