发明名称 Velocity matching electrode structure for electro-optic modulators
摘要 This is an electro-optic modulator having an electro-optic substrate such as lithium niobate, an optical waveguide defined within the substrate, an electrode structure including a microwave transmission line elevated from the substrate by conductive legs. In one embodiment, a low-dielectric constant buffer layer is disposed between the substrate and the transmission line. The conductive legs extend from the transmission line to a surface of the substrate toward the waveguide, through the buffer layer. The microwave transmission line is elevated from the substrate at a distance such that the electrical propagation velocity is at a maximum. The high electrical velocity is offset by a loading capacitance introduced by the conductive legs which slows the electrical velocity down on the transmission line to match the optical velocity. Pairs of opposing conductive legs provide a strong electric field for modulating the optical signal.
申请公布号 US6310700(B1) 申请公布日期 2001.10.30
申请号 US20000662554 申请日期 2000.09.15
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 BETTS GARY E.
分类号 G02F1/035;G02F1/03;G02F1/225;(IPC1-7):G02B6/36 主分类号 G02F1/035
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