| 摘要 |
A mirror for an ultraviolet laser and method of formation such that the mirror is highly reflective to a laser beam generated in the ultraviolet spectrum over a wide range of incident angles and has little fluctuation in polarization reflectivity in relation to a change in an incident angle of the beam. The mirror has a structure comprising an aluminum (Al) film coated over a substrate and a dielectric multi-layer film coated over the aluminum film. The dielectric multi-layer film comprises alternating layers of a low refractive index layer and a high refractive index layer according to the following relationship: L1/[H/L2]x and with an optical thickness according to the following relationship:orwherein:L1, L2: represents the low refractive index layers;H: represents the high refractive index layer(s); andX: is an integer between 1 to 10.
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