| 摘要 |
<p>PROBLEM TO BE SOLVED: To realize a method of laser beam machining and a device for laser beam machining by which a precise machining is performed without generating a deviation in a machining position due to an error of the positioning. SOLUTION: A machining pattern whose reflectivity is different from that of other parts is formed on a work 1 for the laser beam machining. A galovanoscanner scans an optical axis for machining, then the surface of the work 1 is scanned with a detected light from a detector 8 which passes through a laser oscillator 3, a dichroic mirror 93, galvanomirrors 42 and 43, and a lens 5. The detected light reflected on the surface of the work 1 is image-formed on a photosensor 92 via the lens 5, the galvanomirrors 42 and 43, the dichroic mirror 93, and a focusing lens 91. The output from the photosensor 92 becomes larger on the machining pattern and smaller on other parts, the detected signal of the photosensor 92 is binarized by a threshold value preliminarily set on a comparator of a triggering means 10 and is inputted to the laser oscillator 3 after giving a delay time of a predetermined time td.</p> |
