发明名称 |
Wafer transfer device |
摘要 |
A wafer transfer apparatus for taking out a wafer from a wafer cassette having grooves on both ends for holding circumferential edges of a plurality of wafers by moving a wafer transfer arm in height directions and back and forth directions relative to the wafer cassette. The apparatus comprises a wafer pushing out mechanism for pushing out a wafer on the back of a wafer inlet/outlet side of the wafer cassette into which the transfer arm is inserted. The wafer pushing out mechanism comprises a pushing pin rotatable when it is in contact with the wafer and a driving mechanism for driving the pushing pin so as to push the wafer from the back of the wafer cassette to the wafer inlet/outlet side.
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申请公布号 |
US6309166(B1) |
申请公布日期 |
2001.10.30 |
申请号 |
US19990319633 |
申请日期 |
1999.06.08 |
申请人 |
OLYMPUS OPTICAL CO., LTD. |
发明人 |
KATO TOMOO;KIMURA KEIJI |
分类号 |
B65G49/07;H01L21/00;H01L21/677;(IPC1-7):B65G49/07 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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