Beam homogenizer, laser illumination apparatus, and semiconductor device

摘要

A beam homogenizer at least includes a first optical lens for dividing a light beam into N(n'-1) beams in a vertical direction, a second optical lens for dividing the light beam into (2n+1) beams in a horizontal direction, a third optical lens for recombining the beams that are divided in the vertical and horizontal directions into (n'-1) beams while superimposing the (n'-1) beams so that they are deviated from each other in the horizontal direction, and a fourth optical lens for recombining the beams that are divided in the vertical direction.