| 摘要 |
In an ink-jet type recording head including a nozzle plate provided with nozzle openings, a spacer provided with partitions for partitioning pressure generating chambers, ink supply ports and reservoirs, and a plate member sandwiched and fixed together. Displacement of the plate member is produced by piezoelectric vibrators to thereby generate ink droplets. The spacer is formed by anisotropic etching of a silicon single crystal substrate so that the pressure generating chambers, the ink supply ports and the reservoirs are formed as through-holes communicated with each other. Accordingly, etching conditions for the respective through-holes are made equal to each other. Particularly, through-holes small in sectional area such as the pressure generating chambers and the ink supply ports can be formed with a high accuracy.
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