METHOD FOR MANUFACTURING HIGHLY CLEAN PLASTIC FILM OR SHEET, AND HIGHLY CLEAN PACKAGE USING HIGHLY CLEAN PLASTIC FILM OR SHEET

摘要

PROBLEM TO BE SOLVED: To provide a method for efficiently manufacturing a highly clean plastic film or sheet at a low cost without the necessity of setting up large-scale facilities. SOLUTION: This method for manufacturing a highly clean plastic film or sheet 11 using a cleaning device 100 includes a cleaning process which blows an atomized cleaning liquid to the surface of the plastic film or sheet 11 from a cleaning liquid supply nozzle 13 in a cleaning chamber 12 and a removal process which is performed in a liquid removal part 14 for desorbing/separating the cleaning liquid sticking to the surface of the plastic film or sheet 11 by blowing a dust-free gas to the cleaning liquid with the help of a dust-free gas supply nozzle 15.