| 摘要 |
PROBLEM TO BE SOLVED: To enhance the efficiency of cleaning, and modifying a material to be treated by an ultraviolet irradiation device. SOLUTION: This ultraviolet irradiation device 10 has a light, transmission window 20 for irradiating the material to be treated W with ultraviolet light from a lamp house 14 which houses a dielectric barrier excimer lamp 12. The lamp house 14 is filled with an inert gas such as nitrogen introduced therein and the light transmission window 20 has an opening 22 formed for conducting the flow of the inert gas into a space between the material W and the window 20. When the material W is irradiated with the ultra-violet light, the inert gas present in the lamp house 14 finds its way out through the opening 22 and consequently, the surface atmosphere of the material W is filled with the inert gas during irradiating the material W with the ultraviolet light. Thus the attenuation of the ultraviolet light in the region of the atmosphere is inhibited.
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