| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a system by which a mask for the melting erosion by a laser beam having an elongated durability of operation is machined. SOLUTION: The method of machining a mask for the melting erosion by the laser beam includes every of the steps as follows; arranging a substrate in a vacuum chamber, energizing a first coarse evacuation connection having a first maximum evacuation rate by connecting with the vacuum chamber, detecting the time when the pressure in the vacuum chamber is decreased to a first threshold pressure, energizing a second coarse evacuation connection having a second maximum evacuation rate higher than the first maximum evacuation rate by connecting with the vacuum chamber responding to the detection of the fact that the pressure becomes lower than the first threshold pressure, detecting the time when the pressure in the vacuum chamber is decreased to the second threshold pressure, energizing a high vacuum pump connection connected with the vacuum chamber responding to the detection of the fact that the pressure becomes lower than the second threshold pressure, and depositing at least one layer on the substrate in the vacuum chamber. |
