发明名称 Surface acoustic wave device and method for fabricating the same
摘要 A surface acoustic wave device that is small, lightweight and highly reliable, and protects its functional portion. The surface acoustic wave device has surface acoustic wave elements mounted on a circuit substrate. Each surface acoustic wave element includes a frame-like first insulating film furnished to surround functional portions on a chip, and a lid-like second insulating film deposited on the first insulating film so as to cover driving electrodes and surface wave propagation paths of the functional portions, while securing a hollow portion over the functional portions.
申请公布号 US6310421(B2) 申请公布日期 2001.10.30
申请号 US19990231836 申请日期 1999.01.15
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 MORISHIMA KOJI
分类号 H03H3/08;H03H9/05;H03H9/145;H03H9/25;(IPC1-7):H01L41/08 主分类号 H03H3/08
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