SCATTERING PREVENTING METHOD FOR SPIN COATER

摘要

PROBLEM TO BE SOLVED: To prevent the surface contamination of an object caused by the scattering of a coating liquid without bringing about the scaling-up of a spin coater. SOLUTION: A roof 30 is arranged outside a substrate 29 rotated on a turntable 23 and an opening part 31 is formed so as to face the outer edge of the substrate 29. The splash of the coating liquid shaken off from the outer edge of the substrate 29 penetrates into the opening part 31 to be guided to a peripheral trough 27 from the guie passage 32 between the substrate and the turntable 23. The roof prevents such a phenomenon that the splash returns to the substrate on the way or the coating liquid stored in the peripheral trough 27 is scattered to be returned to the substrate 29 and the contamination of the substrate 29 can be prevented. By providing the roof 30, it becomes unnecessary to largely take the distance between the substrate 29 and the outer edge of the turntable and the scaling-up of the coater can be avoided.