| 摘要 |
PROBLEM TO BE SOLVED: To provide a plane chuck for spin coater preventing the generation of irregularity in coating film and a coating method using the same. SOLUTION: The plane chuck 1 has a plane part 2, which receives a plate 4 to be coated on its surface and comprises a low heat conductive material, on the upper surface thereof and a large number of air suction holes 3, 3, etc., for fixing the plate 4 to be coated are provided in the plane part 2. |
