| 摘要 |
<p>PURPOSE:To provide a method for designing a translucent film capable of recognizing the conventional translucent phase shift film not by indirect information, such as phase difference and transmittance but by more concrete information, such as refractive index, attenuation coefft. and film thickness with exactness and elucidating the permissible ranges thereof. CONSTITUTION:The phase difference phi and transmittance (t) obtd. by multiple reflection calculations using an arbitrary coefft. (k) and film thickness (d) are calculated for an arbitrary refractive index (n) by considering this (n) as a fixed value in the method for designing the translucent film which determines the refractive indexing, attenuation coefft. (k) and film thickness (d) of the translucent film. The error between the desired value and the calculated value for the phase difference phi is reduced to the film thickness (d) and the error between the desired value and the calculated value for the transmittance (t) is reduced to the attenuation constant (k). The refractive index (n), attenuation coefft. (k) and film thickness (d) satisfying the desired phase difference phi and transmittance (t) are rapidly and accurately determined by repeating the multiple reflection calculation and reduction.</p> |
