| 摘要 |
<p>PURPOSE:To provide an electrostatic chuck sample stand improving stability of release while requiring no latency time and having high throughput. CONSTITUTION:An electrostatic chuck 1 is arranged on a chamber bottom plate 5 and a sample S is placed on. A double bellows 8 expands and contracts to move a sample release mechanism 2 by introducing into and exhausting from the inside of an ouside bellows 8b of a double bellows 8 circularly mounted around a shaft 2c of a sample release mechanism 2 so as to adjust its inside pressure higher or lower than atmospheric pressure. Then, an air valve 3b and a pressure-adjusting valve 3d perform fine adjustment of the inside pressure of the outside bellows 8b for giving release force smaller than limit attraction force of a sample S to the sample release mechanism 2 so as to separate the sample S. Further, a displacement detection photosensor 4 detects separation of the sample S and the sample release mechanism 2 raises the sample S up to a lifting position.</p> |
