| 摘要 |
PURPOSE:To improve the sensitivity of a magnetic sensor device and reduce the variation of the sensitivity by providing a magnetic material on a magnetism sensitive part in an isolating state and making the lower part of the magnetic material facing the magnetism sensitive part thinner than the upper part. CONSTITUTION:A partial defect is provided by selectively removing part of a polyimide organic insulating film 14 on an InSb layer 11 which is the sensitive part of a magnetic sensor by using an organic solvent. Then a semispherical ferrite body 15 is die-bonded to the layer 11 as a magnetic material with insulating paste 16 so that the spherical part on the bottom of the body 15 can be put in the partial defect where the film 14 is removed. Thus the ferrite body 15 put on the magnetism sensitive part as a magnetic material is made smaller in size as it goes toward the bottom. As a result, the sensitivity of the magnetic sensor can be improved, because the effective magnetic flux density at the magnetic sensor part is increased by leaps and bounds. |
