MASTER FOR PDP, METHOD FOR MANUFACTURING THE SAME, METHOD FOR MANUFACTURING PDP SUBSTRATE USING THE SAME

摘要

PURPOSE: A master for PDP, a method for manufacturing the same, and a method for manufacturing PDP substrate using the same are provided to manufacture finely a master by using a micro machining method and a semiconductor manufacturing process. CONSTITUTION: A cleaning process for a metallic plate(10) is performed. A seed layer(11) is deposited on the metallic plate(10). A thick photo-resist layer is applied as much as the height of a barrier rib of a back plate(20) thereon. A thermal process for the thick photo-resist layer is performed. The thick photo-resist layer is exposed by a photo mask. A photo-resist plating pattern is formed by performing an exposure process and a development process. A metal is injected into the photo-resist plating pattern. A metallic structure(18) is formed by performing a plating process for the photo-resist plating pattern. A master(25) is formed by removing the photo-resist plating pattern.