APPARATUS FOR SENSING BEAM CURRENT OF BEAM GATE FOR ION IMPLANTATION

摘要

PURPOSE: A beam current sensing apparatus of a beam gate used for an ion implantation is provided to exactly check the beam current by protecting a sensing line of the beam current from contaminations. CONSTITUTION: A beam gate(40) is formed in a processing chamber(3a) so as to check a beam current. A moving substance(50) is connected to the beam gate(40) for moving the beam gate. A cylinder assembly(60) has a rotating axis(62) and a rotating substance(64). By driving the rotating axis(62) and the rotating substance(64) of the cylinder assembly(60), the moving substance(50) is converted to a linear motion due to a link substance(70). A sensing line(80) is then expanded and sensed the beam current according to the movement of the beam gate(40). A protection cap(100) is covered to the sensing line(80), thereby preventing the sensing line(80) from contaminations.