| 摘要 |
The present invention comprises an apparatus and a method of microscopy, f or measuring depth dependent profiles of optical absorption, photoluminescence and light scattering in thin films on length scales of a few micrometers to a several millimeters. The principles of this invention are also directly extendable t o imaging absorption and scattering at other wavelengths, and the scattering of electrons, and neutrons in thin films on the same or shorter length scales. In the optical range, this depth profile information is recovered by the direct recording of micrometer scale images of a light beam propagating along the depth axis of the material unde r study. The recording is implemented using a crossed beam microscope apparatus in which a collimated optical beam from a light source is propagated through the materi al under test. An image is recorded along a view axis, oriented at 90 degrees to the source beam axis, through a cross sectional image transfer surface of the sample, s o prepared as to allow transmission of light emitted from the irradiated regio n of the sample. This emitted light is used to transfer an image to a camera of the source beam propagating though the sample, through a microscope or optical system aligne d along the view axis. The depth profile recovered by such a microscope has a composite depth variation, which may be mathematically described by the product of a profile of light attenuation with depth of the source beam in the sample, multiplied by a matrix contrast arising from a depth variation in light emission efficiency of the sample. A modified two beam configuration of the microscope permits the extraction of the light attenuation profile of the source beam in the sample, independently of the matrix contrast.
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