发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To enable accurate cutting of a workpiece with no error without conducting complicated operations also in the case where a rotating blade is exchanged in a cutting device which cuts the workpiece by the movement of the cutting directions relative to a holding means of the workpiece and a cutting means provided with a rotating blade, the index direction of the cutting means and the notch direction of the cutting means. SOLUTION: A distance measuring means 40 to measure the distance in the index direction of a cutting means 23 between a necessary position on a cutting device and a rotating blade is provided at the necessary position and when the rotating blade 24 is exchanged, a difference in distance between the means 40 and the blade 24 located at the reference position before the exchange of the blade 24 and the distance between the means 40 and the blade 24 after the exchange of the blade 24 is found to use the difference for correction and adjustment of the index direction of the cutting means 23 is made on the basis of the correction amount.
申请公布号 JP2001297999(A) 申请公布日期 2001.10.26
申请号 JP20000110788 申请日期 2000.04.12
申请人 DISCO ABRASIVE SYST LTD 发明人 SEKIYA KAZUMA
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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