| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for deposition of a DLC protective film having high hardness, excellent wear resistance and high adhesiveness to a substrate and capable of making film thickness thinner on an ABS surface of a thin film magnetic head. SOLUTION: The ABS surface is constructed by using a substrate consisting of Al2O3 and TiC and the DLC film is formed after the ABS surface is sputtered by using plasma which contains carbon to obtain strong bonding force between carbon atoms in the ABS surface and the DLC film. In a second means, a carbon nitride film is deposited as the protective film, after the ABS surface is sputtered by using nitrogen plasma, to obtain strong bonding force between nitrogen atoms in the ABS surface and the carbon nitride film. In a third means, hardness of the DLC film is increased and wear resistance is improved by depositing the DLC film after forming an intermediate layer of Si which contains one element of Fe, Ni and Co on the ABS surface. In a fourth means, the protective film having high adhesive force and excellent wear resistance is obtained by applying high frequency voltage of a square wave to the substrate at the time of DLC sputtering.
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