| 摘要 |
PROBLEM TO BE SOLVED: To reduce interference in controlling an object to be controlled with interference and also set a control parameter by correctly executing auto-tuning. SOLUTION: This system is provided with a plurality of heaters and a plurality of temperature sensors which are made individually correspond to each other and a plurality of PID control means 61-6n, and the mean temperature of the detected temperatures of the plurality of temperature sensors and a gradient temperature based on the detected temperatures are calculated by a mean temperature and gradient temperature calculating means 5, and an operation signal is outputted by each PID control means 61-6n so that the mean temperature or each gradient temperature can be set as a target value, and the operation signal from each PID control means 61-6n is distributed to each heater by a distributing means 7 so that the control of each PID control means 61-6n can be prevented from affecting the control of the other PID control means.
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