WATER-REPELLENT ARTICLE, AND METHOD OF WATER-REPELLENT THIN FILM COATING

摘要

PROBLEM TO BE SOLVED: To solve the conventional problem that no thin film of single-layer structure combining a function of providing water repellency to the surface of an article with a function of reducing reflectivity has been obtained so far and the appearance of a water-repellent thin film excellent in wear resistance and having water repellency has been expected. SOLUTION: The article is constituted by coating a glass plate with a fluorine-containing water-repellent thin film. The water-repellent thin film is constituted by incorporating fluorine, by means of doping from fluorine compound gas, into a silicon dioxide film deposited by sputtering. The fluorine compound gas such as ethylene fluoride is introduced into a film deposition chamber during silicon dioxide film deposition. By this method, the deposition of the thin film having refractive index lower than that of a single-component film composed of silicon dioxide and also having water repellency can be attained.