| 摘要 |
PROBLEM TO BE SOLVED: To provide a member for thin film deposition system, capable of effectively preventing the peeling of deposits formed on the inner wall of a thin film deposition system and the surface of equipment members inside the system without contaminating the inside of the system and capable of suppressing the occurrence of particles, and its manufacturing method. SOLUTION: In the member for thin film deposition system, a plurality of recessed parts and projecting parts are formed in the area on which unnecessary thin-film deposition occurs, and the resultant projecting parts have a form where a top plane is connected to an inclined plane by a gently-sloped curved surface. Further, the relation of x2-x1>0 is satisfied when x1 represents the starting point at which the top plane of the projecting part changes into the inclined plane and x2 represents the point of intersection of the extension line of the top plane of the projecting part and the tangent line of the inclined plane, on the supposition that the central right half in the cross section of the projecting part is a coordinate system of y-axis and an x-axis.
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