发明名称 ULTRATHIN PLATE CRYSTAL ELEMENT AND PRODUCTION METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide an inexpensive crystal element using a substrate having small frequency deviation between resonance electrodes. SOLUTION: A vibrator having improved degree of flatness can be formed by forming it into a square, rectangle or polygon and performing etching so that at least one side of the vibrator can be almost coincident with the direction of the angle at from -13 deg. to -30 deg. in respect of the X axis of an AT cut crystal substrate while using the principal side vertical direction of the crystal substrate as a axis and further at least another side crossing one side on an extension line can be almost coincident with the direction of turn angle from -103 deg. to -120 deg. in respect of the X axis. As a result, frequency deviation between input and output electrodes is suppressed and price reduction can be realized according to the improvement of yield.
申请公布号 JP2001298345(A) 申请公布日期 2001.10.26
申请号 JP20000109987 申请日期 2000.04.11
申请人 TOYO COMMUN EQUIP CO LTD 发明人 KAMEDA TAKAHIRO
分类号 H01L41/09;H01L41/18;H01L41/22;H01L41/332;H03H3/02;H03H9/19;H03H9/56 主分类号 H01L41/09
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