| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface-potential measuring apparatus by which the surface potential in the very small part of a sample having a high potential can be measured. SOLUTION: In the surface-potential measuring apparatus, piezoelectric pulses at a frequency corresponding to the natural frequency of a probe 14 are given to a piezoelectric element 12, and the probe 14 is vibrated in the transverse direction. A Z-direction controller 182 drives and controls a Z-direction movement device 16Z so as to bring the probe 14 close to the sample 36. The probe 14 is irradiated with a laser beam by a laser light source 32. In a PC 28, vibration information on the laser beam is obtained from a photodiode 44, and the vibration state of the probe 14 is detected. The probe 14 is brought close to the surface of the sample 36, a shear force acts on the probe 14, and the vibration of the probe 14 is damped. While its position is used as a reference point, the distance between the sample 36 and the probe 14 is controlled.
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