| 摘要 |
PROBLEM TO BE SOLVED: To increase the number of semiconductor devices which can be inspected simultaneously without increasing the number of drivers at a semiconductor tester when a semiconductor device which is operated at high speed is inspected. SOLUTION: In a common-drive interconnection, a signal from one driver 12b (or 12c) inside the tester 11 is branched, and branched signals are supplied to input terminals 15b, 15e (or 15c, 15f) of a plurality of semiconductor devices 14a, 14b to be inspected. Resistor 17 are inserted across a branch point 16a (or 16b) inside a probe card 13 and the respective terminals 15b, 15e (or 15c, 15f). Capacitors 18 are connected in parallel with the resistances. The capacitance value of each capacitor 18 is set to be larger than the input capacitance value of each terminal.
|
