| 摘要 |
PROBLEM TO BE SOLVED: To provide an article consisting of an optical hollow having a micron size suitable for making an optical interface effect. SOLUTION: The article consisting of an optical hollow includes two mirrors placed parallel to each other at an interval, and at least one mirror is preferably movable. In some embodiments, both mirrors are formed of single crystal silicon to which stress is not applied. The single crystal silicon to be used in some embodiments is supplied preferably from a single crystal silicon (SOI) wafer on an insulating material. A first mirror is patterned on the thin silicon layer of a first SOI wafer. A pillar is placed on the thin silicon layer near the first mirror. The thin silicon layer of a second SOI wafer is attached to the pillar so that a gap exists between the thin silicon layers keeping two intervals. The thin silicon layer of the second SOI wafer is released by removing the thick silicon layer and an embedded oxide from the wafer, and thus forms a movable mirror. |
