发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device wherein the effect of electric-field relaxation is maintained while rising of on resistance in on-state is suppressed. SOLUTION: N+ type diffusion regions 6a-6d as well as P- type diffusion region 5a and the like are formed on the surface and its vicinity of an N- type epitaxial layer 2 on a p-type silicon substrate 1. Gate electrodes 8a and 8b are formed on the P- type diffusion region 5a positioned between the N+ type diffusion regions 6a and 6b and the N- type epitaxial layer 2 through a gate insulating film. A source electrode 9 and a drain electrode 10 are respectively formed. Under a field separation film 14, a P type diffusion region 7 is discretely formed in the direction across the direction where a current flows in on-state.
申请公布号 JP2001298183(A) 申请公布日期 2001.10.26
申请号 JP20000112174 申请日期 2000.04.13
申请人 MITSUBISHI ELECTRIC CORP 发明人 TERAJIMA TOMOHIDE
分类号 H01L29/73;H01L21/331;H01L21/8234;H01L27/04;H01L27/088;H01L29/06;H01L29/10;H01L29/739;H01L29/76;H01L29/78 主分类号 H01L29/73
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